AVIZA Technology, Inc.
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APCVD Furnaces

Aviza Technology's APCVD systems provide low cost of ownership, high film quality and process versatility. Aviza offers the following APCVD system platforms:

Production-proven performance

* WJ-999 Series for TEOS or Hydride applications.

* WJ-1000/1500 Series for TEOS or Hydride applications.